敞開(kāi)式光柵尺-LIDA系列

LIDA系列具有較高的運(yùn)行速度和較大的測(cè)量長(zhǎng)度
Model | Baseline error | Substrate and mounting | Interpolation error | Measuring length | |
---|---|---|---|---|---|
Accuracy grade | Intervall | ||||
LIDA 473 LIDA 483 | ± 1 μm ± 3 μm ± 5 μm | ≤ ± 0.275 μm/ 10 mm | Glass or glass ceramic scale, bonded to the mounting surface | ± 45 nm | 240 mm to 3040 mm |
LIDA 475 LIDA 485 | ± 5 μm | ≤ ± 0.750 μm/ 50 mm (typ.) | Steel scale tape drawn into aluminum extrusions and tensioned | ± 45 nm | 140 mm to 30040 mm |
LIDA 477 LIDA 487 | ± 3 μm ± 5 μm ± 15 μm | ≤ ± 0.750 μm/ 50 mm (typ.) | Steel scale tape drawn into aluminum extrusions and fixed | ± 45 nm | 240 mm to 6040 mm |
LIDA 479 LIDA 489 | ± 3 μm ± 15 μm | ≤ ± 0,750 μm/ 50 mm (typ.) | Steel scale tape, bonded to the mounting surface | ± 45 nm | Up to 6000 mm |
LIDA 277 LIDA 287 | ± 15 μm | Steel scale tape drawn into aluminum extrusions and fixed | ± 2 μm | Up to 10000 mm | |
LIDA 279 LIDA 289 | ± 15 μm | Steel scale tape, cemented on mounting surface | ± 2 μm | Up to 10000 mm |
LIDA系列:
LIDA 475/485
LIDA 477/487
LIDA 479/489
LIDA 277/287
LIDA 279/289