敞開(kāi)式光柵尺-LIP系列
LIP系列具有非常高的精度
Model | Basline error | Substrate and mounting | Interpolation error | Measuring length | |
---|---|---|---|---|---|
Accuracy grade | Intervall | ||||
LIP 372 LIP 382 | ± 0.5 μm | ≤ ± 0.075 μm/ 5 mm | Zerodur glass ceramic embedded in bolted-on Invar carrier | ± 0.01 nm | 70 mm to 270 mm |
LIP 211 LIP 281 LIP 291 | ± 1 μm ± 3 μm | ≤ ± 0.125 μm/ 5 mm | Scale of Zerodur glass ceramic with fixing clamps | ± 1 nm | 20 mm to 3040 mm |
LIP 471 LIP 481 | ± 0,5 μm ± 1 μm | ≤ ± 0.175 μm/ 5 mm | Scale of Zerodur glass ceramic or glass with fixing clamps | ± 7 nm | 70 mm to 420 mm |
LIP 571 LIP 581 | ± 1 μm | ≤ ± 0.175 μm/ 5 mm | Glass scale, fixed with clamps | ± 12 nm | 70 mm to 1440 mm |
LIP 6000 | ±1 μm (bis Messlänge 1020 mm); ±3 μm | ≤ ± 0.175 μm/ 5 mm | Scale of Zerodur glass ceramic, by adhesive or fixing clamps | ± 3 nm | 20 mm to 3040 mm |
LIP系列:
LIP 211/LIP 281/LIP 291
LIP 471/481
LIP 571/581
LIP 6000