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      電阻真空計 INFICON Capacitance Diaphragm Gauge

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      • 公司名稱安徽貝意克設(shè)備技術(shù)有限公司
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      • 更新時間2022/12/10 12:26:14
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      安徽貝意克設(shè)備技術(shù)有限公司成立于2012年,隸屬百思集團,其平行公司有百思新材料研究院有限公司、合肥萊德裝備技術(shù)有限公司、天津百諾金科技有限公司、合肥歐萊迪光電技術(shù)有限公司、安徽貝意克智能科技有限公司。貝意克公司于2020年在合肥投資5億元新建5萬平米貝意克智能裝備產(chǎn)業(yè)園。設(shè)有貝意克工程設(shè)計中心,貝意克工程技術(shù)中心,貝意克聯(lián)合實驗室等研發(fā)公共服務(wù)平臺。貝意克主要從事實驗室儀器設(shè)備的研發(fā)生產(chǎn),主營各類型箱式爐、管式爐、CVD、PECVD、 ALD、 PVD磁控濺射、真空鍍膜、薄膜制備、納米材料制備裝備、各種高精度真空箱以及各類非標(biāo)定制,產(chǎn)品領(lǐng)域涉及科研、光電產(chǎn)業(yè)化、半導(dǎo)體、等高科技產(chǎn)業(yè)。公司致力于提供專業(yè)的設(shè)備、技術(shù)和服務(wù),助力新材料研發(fā)。
      真空計
      ThisisaPiraniCapacitanceDiaphragmGauge(EQ-PGC-554)combinesthepatentedceramiccapacitancediaphragmsensortechnologywiththeadvantagesofaPiranigaugeinasingleproduct
      電阻真空計 INFICON Capacitance Diaphragm Gauge 產(chǎn)品信息

        This is a Pirani Capacitance Diaphragm Gauge (EQ-PGC-554) combines the patented ceramic capacitance diaphragm sensor technology with the advantages of a Pirani gauge in a single product. In the measurement range between 10 mbar and atmosphere, the capacitance diaphragm technology provides gas-type independent, highly accurate values for reliable pressure measurement.

        With the need to factor gas type dependency into the pressure reading output being eliminated, risks of explosions in tube vessels or other chambers due to incorrect display of pressure AND/OR negligence of adjustment for gas types ARE GREATLY REDUCED.

      Features

      Designed and made by Switzerland-based INFICON

      Gas-type independent above 10 mbar - allows safe venting with any gas mixture

      High accuracy and reproducibility at atmosphere for reliable atmospheric pressure detection

      Fast atmospheric detection eliminates waiting time and shortens process cycle

      Versatile mounting orientation provides engineering freedom in tool design

      fully ceramic coated sensor unit for highly corrosive applications

      Easy to exchange plug & play sensor element with onboard calibration data guarantees high reproducibility and low cost of ownership        

      Power Connection

      9 pins D-sub connector. 

      Power Adapter

      One 15 VDC power adapter is included and ready to use. Input voltage for the adapter is 110~240 V.

      Measurement Range

      3.8E-5 to 1125 Torr.

      Accuracy

      ?5×10-4 … 1×10-3 mbar (N2) ±50% of reading

      1×10-3 … 100 mbar (N2) ±15% of reading 

      100 … 950 mbar ±5% of reading 

      950 … 1050 mbar ±2.5% of reading 

      Display

      Digital display (20x14 mm) with measurement unit Torr 

      Gauge Fitting

      Small Foot-Print with KF16 port

      Dimensions

      46 mm×28 mm×126 mm (L x W x H)

      Shipping Weight

      5 lbs

      Warranty

      One year limited manufacturer warranty, please contact  vc.service.usa for information.

      In the case of severe contamination or malfunction, the sensor can be replaced, please read the?instruction?for details. Replacement sensor is offered at $574/each)

      Calibration

      The pressure gauge is manufactured calibrated base on PTB / METAS (German / Swiss NIST) standards. Calibration data is available upon request.

      Application Notes

      General vacuum measurement and control in the Medium Vacuum Range (Range 1.0E-4 Torr to ATM).

      Pirani gauges used in a clean environment can effectively operate above 5.0E-5 Torr range. 

      If your tool requires effective reading in the 1.0E-5 Torr or lower, please select Pirani/Cold Cathode gauge with measurement range from 3.75E-9 to 760 Torr

      Optional: M14 to KF16 adapter is needed for the use with MTI vacuum flanges, please click pic below to order replacement part

      By connecting to a set of Solenoid Valves, this gauge can also be used with a pressure control system to keep the pressure constant in a vacuum system.

      INFICON

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