thyrcont圖拉特真空計VSH88E

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昆山熙日機械設備有限公司

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聯系人：張小姐,李先生

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thyrcont圖拉特真空計VSH88E

詳細介紹

thyrcont圖拉特真空計VSH88E

Thyracont-Smartline-Vakuumtransmitter-VSH88DL-3112-16-DL.jpg

VSH88E Vacuum Transducer ● DN40KF ● EtherCAT

The digital combination vacuum transducer VSH (Pirani/hot cathode) with EtherCAT interface measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represents cutting edge technology providing safe, precise and cost effective process control.

描述

Wide range sensor Pirani / Bayard Alpert
Pirani with extended range allows operation of hot cathode at
lower pressure and increases lifetime
Excellent accuracy and repeatability
Bayard-Alpert with blowing resistant, yttrium coated double filament,
insensitive against inrush of air
Digital RS485 interface and EtherCAT
Automatic baud rate detection 9.6 kBd to 115 kBd
Two independent, potential-free relay switch points
Easily replaceable sensor heads with stored calibration data

應用

Coating plants and vapor deposition
Sputtering plants
Analysis technology
Measuring and controlling in the fine and ultrahigh vacuum range
Vacuum furnaces
Process engineering
Space simulation chambers

技術參數

WEIGHT	0.555 kg
DIMENSIONS	4.8 x 6.9 x 1.46 cm
MEASURING PRINCIPLE	Pirani / Bayard Alpert, depending on gas type
MATERIALS IN CONTACT WITH VACUUM	Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass
MEASUREMENT RANGE	1000 – 5e-10 mbar (750 – 5e-10 Torr), max. overpressure 4 bar abs.
ACCURACY	1000 – 10 mbar: < 30 % from reading 10 – 1e-8 mbar: < 10 % from reading
REPEATABILITY	±2 % (10 – 1e-2 mbar), 5% (1e-2 – 1e-8 mbar)
RESPONSE TIME	< 200 ms (2 s while switching BA emission current)
EMISSION CURRENT	Automatic switching 10 µA, 100 µA, 1 mA, 2 mA
DEGAS	Ohmic heating of the anode
POWER SUPPLY	20 – 30 VDC
ELECTRICAL CONNECTION	M12 circular connector, female, lockable, 1x A standard, 5pol., 2x D coded, 4pol.
POWER CONSUMPTION	Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD
OPERATING TEMPERATURE	+5…+60°C
STORAGE TEMPERATURE	-40…+65°C
MAX. BAKE OUT TEMPERATURE	180°C at the flange (electronic detached)
OUTPUT SIGNAL	0 – 10 VDC, measuring range 1.219 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm
SERIAL INTERFACE	RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
SWITCH POINT	2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
VACUUM CONNECTION	DN 40 ISO-KF
PROTECTION CLASS	IP54