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      日本YAMATO等離子清洗機PR300/301
      
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      產(chǎn)品型號PR300/PR301
      
							
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      日本YAMATO等離子清洗機PR300/301
      
				
      
				
      
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         日本YAMATO等離子清洗機PR300/301：
       
               
        
        Low Temperature Asher   
       
        PR300/PR301   
              
       
        
        
        
        Model   
       
        300    301   
       
        Method   
       
        Barrel type of DP
       DP : direct plasma              		 
       
        High-frequency Output   
       
        Max.300W   
       
        Oscillating Frequency   
       
        13.56MHz   
       
        Reaction Chamber   
       
        ?64×160mm
       3 chambers              		  ?118×160mm
       1 chamber              		 
              
             		  
       The PR 300 isagasplasma device that is used widely for suchapplicationsasproduction of semiconductors and analysis work.Itboastsoutstanding operabi lity and safety, with anautomatictuningsystem as a standard component and other features.It has acompactdesign, with a small-size HF generator and anoscillationsectionintegrated with a portion of the chamber,allowing it tobeinstalled into a 19-inch rack.  
       
         
      •  Three 64mm diameterchambersareincluded. (PR300)  
        •  
      •  The unit can be set for awiderangeof output conditions to handle a variety oftestingsamples.  
        •  
      •  One 118mm diameter largechamberisaccommodated.  
        •  
       
        
            
              
             		 
       
        
       *      The gas plasmaequipment has a wide range ofapplications fromashing, etching,dry cleaning,etc.              		 
              
       
       
       
        
        * Reaction Chamber   
       
        PR300 Reaction Chamber    PR300 Reaction Chamber   
       
        * Control Panel        
       
        PR300 Control Panel        
              
       
       
       
        
        * Operation Flowchart   
       
        PR300 Operation Flowchart   
       
        * Piping System Diagram (PR300)   
       
        PR300 Piping System Daigram   
              
       
       
       
        
        Specifications   
       
        
        
        Model    PR300    PR301   
       
        *Method    Barrel type of direct plasma   
       
        * Controlpart   
       
        Highfrequency output    300Wvariable (100W×3 chambers)   
       
        Oscillating frequency    13.56MHz   
       
        Outputimpedance    50Ω   
       
        Tuningmethod    Manual biaxial tuning method   
       
        Instrument    Output watt meter (0 to 300W)
       Reflected wave watt meter (0 to 100W)
       Vacuum gauge, bourdon's tube type
       Flow meter, needle valve integrated type, 1 set              		 
       
        Timer    0.1sec. to 999h   
       
        Gasinlet    1/4"stainless steel   
       
        Powersource (50/60Hz)    AC100/220V, single phase, 1 kVA   
       
        * Reactionpart   
       
        Reactionchamber    Made ofsuperhardglass, ?64×160mm×3 chanbers    Madeofpyrexglass, ?118×160mm   
       
        Electrodestructure    Condenser type, 2-way split   
       
        Controlsystem    Autopressure reduction, auto leak valve   
       
        Pipingmaterial    Stailesssteel,Teflon, Copper and Brass    Stainlesssteel,Teflon   
       
        Externaldimensions(W×D×Hmm)    438×520×556    438×520×656   
       
        Weight    Approx.38kg    Approx. kg   
       
        * StandardAccessories   
       
             
         
      •  Vacuum grease :1 container  
        •  
      •  O-ring for reactionchamber:6pcs.  
        •  
      •  Sample dish (large andsmall):each4sets  
        •  
      •  Lid for reactionchamber:4sets  
        •  
      •  Adapter for ground:1pc.  
        •  
             		 
       
        * OptionalAccessories   
       
        * Sample dish(large)* Sample dish (small)* Sample shelf* Stand   
              
             		 
              
       
       
			        
      
			    
      
                			    
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