● 適合大型偏置負(fù)載的寬基體
● 兼容450毫米晶圓
● 強(qiáng)大的雙直線電機(jī)驅(qū)動(dòng)
● 設(shè)計(jì)用于高性能的掃描和檢測(cè)
● 所有空氣軸承表面采用主動(dòng)空氣預(yù)緊
● 線性編碼器反饋提供了亞納米分辨率
● 可承受重載荷的高剛性和優(yōu)秀的幾何性能
● 四種型號(hào)，行程為200 ～500mm

空氣軸承設(shè)計(jì)實(shí)現(xiàn)高動(dòng)態(tài)性能
The ABL1500WB incorporates an air-on-air preload on both the vertical and horizontal surfaces. The opposing thin-film pressure maintains the bearing nominal gap tolerance. This design, in addition to the large air-bearing surface that distributes the load over a large surface area, results in a stage with outstanding stiffness that is ideal for heavy or offset loading.

Aerotech’s proprietary manufacturing techniques result in a stage with unsurpassed geometric characteristics, which maximize performance by yielding superior pitch, roll, yaw, straightness and flatness specifications.

直線電機(jī)驅(qū)動(dòng)
The driving force behind this stage is Aerotech’s BLMC series brushless linear servomotor. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces, resulting in unsurpassed smoothness of motion.

零維護(hù)
Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL1500WB experiences no wear or reduction in performance over time. Service life is virtually unlimited and because there is no lubrication – only clean, dry gas– air bearings are ideal for cleanroom and medical applications.

電纜管理
We carefully optimize the cable bend radius to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime.

We include all customer-required cables, air hoses, etc. in our CMS bundle to facilitate integration into the final system. Both ends are fully connectorized for simple integration into the customer’s machine.