● Compact stage with travels to 100 mm
● Low-thermal expansion glass-scale linear encoder
● Precision-ground ball-screw drive
● DC servo or stepper motor
● Anti-creep crossed-roller bearings
● High resolution (0.025 μm), repeatability (±0.1 μm) and accuracy (±0.75 μm)
● Optional bellows waycovers

● Compact multi-axis configurations

Ultra-Precise Design
The precision ground, preloaded ball-screw coupled with the linear encoder provide outstanding accuracy, repeatability and a positioning resolution capability to 25 nm. The anti-creep crossed-roller bearings provide exceptionally smooth travel and high-load capacity in a compact package.

Unlike competitive designs using steel (13 ppm/˚C) or glass scales with 8 ppm/˚C thermal expansion coefficients, the MPS75SLE is available with a low thermal expansion (3.3 ppm/˚C) precision glass scale allowing for high-accuracy and repeatable positioning over long periods of time. The linear encoder is available with amplified sine (1 Vpp) or 50 nm TTL digital outputs allowing for easy integration with all standard controllers.

Highly Configurable
The MPS75SLE motor options include a DC servomotor with a high-resolution rotary encoder or a stepper motor. Just like the MPS75SL, the SLE is available with and without optional bellows waycovers.

An optional mounting plate provides direct mounting to both English and metric optical breadboards. The inherent mounting compatibility of all MPS stages allows for simple mounting in multi-axis arrangements.