基板尺寸 Maximum board size 510*510mm
最小基板尺寸 Minimum board size 50*50mm 基板厚度尺寸 Board thickness 0.4~6mm 取像機(jī)械范圍 Camera Mechanical range 510*510mm 基板重量 Maximum board weight 5kg 基板邊緣間隙 Board edge clearance 2.5mm
過(guò)板高度 Board height 23mm 超出***頂pin 傳輸高度 Transport speed 900 ± 40mm 傳輸速度 (Max) Transport speed 分段控制,1500mm/s (Max) 傳輸方式 Transport direction 一段式運(yùn)輸導(dǎo)軌 One stage 傳輸方向 Transmission direction 左至右 Left to right 右至左 Right to Left 同進(jìn)同出 In and out the same
基板支撐方法 Support System 磁性頂針 (65mm) Magnetic Pin 等高塊 (65mm) Support Block 自動(dòng)調(diào)節(jié)頂升平臺(tái) Manual Up-down table 基板夾持 Board clamp 自動(dòng)伸縮式上壓片 Automatic top clamping 柔性邊夾 Side clamping 真空吸附功能 Adsorption function