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      當(dāng)前位置:北京艾瑪特科技有限公司銷售部>>高精密定位平臺>>精密轉(zhuǎn)臺>>WaferMax T機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage

      WaferMax T機(jī)械軸承精密直驅(qū)轉(zhuǎn)臺 | WaferMax T Mechanical-Bearing Direct-Drive Rotary Stage

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      產(chǎn)品型號

      品       牌

      廠商性質(zhì)代理商

      所  在  地北京市

      聯(lián)系方式:王曉春查看聯(lián)系方式

      更新時(shí)間:2024-08-26 12:13:02瀏覽次數(shù):72次

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      經(jīng)營模式:代理商

      商鋪產(chǎn)品:406條

      所在地區(qū):北京北京市

      聯(lián)系人:王曉春 (銷售主管)

      產(chǎn)品簡介

      Aerotech的 WaferMax T 轉(zhuǎn)臺是需要低高度封裝結(jié)構(gòu)提供高性能應(yīng)用的理想選擇。最初設(shè)計(jì)用于滿足精密晶片檢測的需求,WaferMax T已經(jīng)被應(yīng)用到多種應(yīng)用。需要有限旋轉(zhuǎn)時(shí),標(biāo)準(zhǔn)25毫米孔徑允許真空線容易直通穿過。如果連續(xù)旋轉(zhuǎn)是必要的,可選的單或雙端口旋轉(zhuǎn)接頭可以合并。臺面包括一個(gè)標(biāo)準(zhǔn)的安裝模式,其允許晶片易于卡盤安裝。

      詳細(xì)介紹

      ● 薄型封裝結(jié)構(gòu)適用于空間有限的應(yīng)用
      ● 直接驅(qū)動無刷無槽伺服電機(jī)
      ● 直接耦合的高精度旋轉(zhuǎn)編碼器
      ● 25毫米孔徑
      ● 可選配用于真空環(huán)境的旋轉(zhuǎn)接頭


      機(jī)械設(shè)計(jì)

      Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and rotating friction. A thick-walled, precision-ground shaft further minimizes wobble.


      Cable management is a snap with integral motor power and feedback connectors. Because the WaferMax T is a self-contained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.


      無刷直驅(qū)

      To maximize positioning performance, the WaferMax T utilizes Aerotech’s S-series brushless, slotless motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity or precise incremental steps. The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.


      精確定位

      Performance is assured with a 10,000 lines per revolution encoder that results in 0.065 arc sec resolution. A 2048 line option is also available. The motor and high-performance rotary encoder are directly coupled to a common shaft.


      靈活配置

      Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.


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