● 大行程形式下實現(xiàn)納米級性能
● 高分辨率(1納米)，重復(fù)精度(75納米)和精度(250納米)
● 定位穩(wěn)定性<1納米
● 抗蠕變交叉滾柱軸承
● 高動態(tài)性能
非接觸直接驅(qū)動
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-L stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demａnd smooth and precise motion.
靈活的系統(tǒng)設(shè)計
The ANT95-L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.
系統(tǒng)特性
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95-L stage’s industry-leading 1 nm minimum incremental step size provides this high level of performance. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.
