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      北京艾瑪特科技有限公司銷售部
                                
                
                
      

							
      
                        			
      
		
      
	
      
	
	
      
		
      
            
			
      
				
      
					
      X-Y Planar Air Bearing System
      
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								更新時間：2024-08-26 11:50:00瀏覽次數(shù)：93次
							
      
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      經(jīng)營模式：代理商
      
						
      商鋪產(chǎn)品：406條
      
						
      所在地區(qū)：北京北京市
      
						
      聯(lián)系人：王曉春 （銷售主管）
      												
					
      
				
      
			
      			
      
                                
      
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      X-Y Planar Air Bearing System
      
				
      
				
      
                    詳細(xì)介紹
                
      
			    
      
			        
      
			            
      Patent Pending X-Y Planar Motion System:
      ALIO has developed the next generation of nano-precision X-Y Planar system for Semiconductor, FPD and other application needing less than 1 arc second of pitch, yaw and roll with picometer resolution over large volumes. The ALIO team took a new approach to the next generation of equipment needed for the FPD and metrology markets. Larger glass for Gen 7, 8 and beyond in FPB the issues of maintaining high volume and high yields during process and inspection the need for a new mechanical design to eliminate mechanical beam thermals, bending and orthogonality position errors. The ALIO X-Y Planar system decouples and isolates the X and Y beam thermals, sage and alignment issues in a novel but simple kinematic design.
       
      The X-Y Planar system has an application dependant platen for open center or vacuum wafer chuck mounting.
      
			        
      
			    
      
                                                				
			
      
			
      
		
      
	
      
	
    
      
		
      
			
      
				
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