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      昆山熙日機械設(shè)備有限公司
                                
                
                
      

							
      
                        			
      
		
      
	
      
	
	
      
		
      
            
      
                當(dāng)前位置：昆山熙日機械設(shè)備有限公司>>真空測量與檢測>>thyrcont圖拉特真空計VSM77DL
            
      
			
      
				
      
					
      thyrcont圖拉特真空計VSM77DL
      
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      thyrcont圖拉特真空計VSM77DL
      
				
      
				
      
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      QQ圖片20180107152039.pngthyrcont圖拉特真空計VSM77DL
      VSM77DL Vacuum Transducer ● DN25KF ● LCD display
      The digital combination vacuum transducer VSM (Pirani/cold cathode) with integrated display measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
      Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.
      描述
      • Wide range sensor Pirani / cold cathode
      • Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
      • Robust sensor design, insensitive against inrush of air
      • Digital RS485 interface and analog output signal 1.819-8.6 V
      • Automatic baud rate detection 9.6 kBd to 115 kBd
      • Large, integrated LCD display with background illumination
      • Two independent, potential-free relay switch points
      • Easily replaceable sensor heads with stored calibration data
      應(yīng)用
      • Mass spectrometry
      • Coating plants and vapor deposition
      • Measuring and controlling in fine and ultrahigh vacuum
      • Process engineering
      • Sputtering plants
      • Vacuum furnaces
      技術(shù)參數(shù)
      WEIGHT0.555 kg
      DIMENSIONS6.9 x 4.8 x 15.3 cm
      MEASURING PRINCIPLE
      Pirani / inverted magnetron, both depending on gas type
      MATERIALS IN CONTACT WITH VACUUM
      Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic
      MEASUREMENT RANGE
      1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs.
      ACCURACY
      10 – 2e-3 mbar: < 10 % from reading, 1000 – 10 mbar: < 30 % from reading, 2e-3 mbar – 1e-8 mbar: < 25% from reading
      REPEATABILITY
      10 – 1e-2 mbar: Approx.. ±2% from reading, 1e-2 – 1e-8 mbar: Approx.. ±7% from reading
      RESPONSE TIME
      200 ms (1s for activating the cold cathode)
      CATHODE VOLTAGE
      Max. 2,5 kV
      POWER SUPPLY
      20 – 30 VDC
      ELECTRICAL CONNECTION
      SubD 15pol., male, lockable
      POWER CONSUMPTION
      Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD
      OPERATING TEMPERATURE
      +5…+60°C
      STORAGE TEMPERATURE
      -40…+65°C
      MAX. BAKE OUT TEMPERATURE
      160°C at flange (electronic detached)
      OUTPUT SIGNAL
      0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm
      SERIAL INTERFACE
      RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
      SWITCH POINT
      2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
      VACUUM CONNECTION
      DN 25 ISO-KF
      PROTECTION CLASS
      IP40
      vsme.pdf
      man_vsm-de-en-171005.pdf

           
			        
      
			    
      
                                                				
			
      
			
      
		
      
	
      
	
    
      
		
      
			
      
				
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