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                當(dāng)前位置：昆山熙日機(jī)械設(shè)備有限公司>>真空測量與檢測>>thyrcont圖拉特真空計VSM78D
            
      
			
      
				
      
					
      thyrcont圖拉特真空計VSM78D
      
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      thyrcont圖拉特真空計VSM78DVSM78DVacuumTransducer●DN40KFThedigitalcombinationtransducerVSM(Pirani/coldcathode)measuresabsolutepressurefromatmosphericpressuretoultrahighvacuum
      
				
      
				
      
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      QQ圖片20180107152039.pngthyrcont圖拉特真空計VSM78D
      Thyracont-Smartline-Vakuumtransmitter-VSM77DL-3075-79-DL.jpg
      VSM78D Vacuum Transducer ● DN40KF
      The digital combination transducer VSM (Pirani/cold cathode) measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
      The microcontroller intelligence of this vacuum gauge automatically manages the optional interplay of both vacuum sensors.
      描述
      • Wide range sensor Pirani / cold cathode
      • Pirani with extended range allows operation of cold cathode at lower pressure and increases lifetime
      • Robust sensor design, insensitive against inrush of air
      • Digital RS485 interface and analog output signal 1.819-8.6 V
      • Automatic baud rate detection 9.6 kBd to 115 kBd
      • Two independent, potential-free relay switch points
      • Easily replaceable sensor heads with stored calibration data
      應(yīng)用
      • Mass spectrometry
      • Coating plants and vapor deposition
      • Measuring and controlling in fine and ultrahigh vacuum
      • Process engineering
      • Sputtering plants
      • Vacuum furnaces
      技術(shù)參數(shù)
      WEIGHT0.555 kg
      DIMENSIONS6.9 x 4.8 x 15.3 cm
      MEASURING PRINCIPLE
      Pirani / inverted magnetron, both depending on gas type
      MATERIALS IN CONTACT WITH VACUUM
      Stainl. steel 1.4307, nickel, tungsten, molybdenum, glass, ceramic
      MEASUREMENT RANGE
      1000 – 5e-9 mbar (750 – 5e-9 Torr), max. overpressure 10 bar abs.
      ACCURACY
      1000 – 10 mbar: < 30 % from reading 10 – 2e-3 mbar: < 10 % from reading 2e-3 mbar – 1e-8 mbar: < 25% from reading
      REPEATABILITY
      10 – 1e-2 mbar: Approx. ±2% from reading, 1e-2-1e-8 mbar: Approx. ±7% from reading
      RESPONSE TIME
      200 ms (1s for activating the cold cathode)
      POWER SUPPLY
      20 – 30 VDC
      ELECTRICAL CONNECTION
      SubD, 15pol., male, lockable
      POWER CONSUMPTION
      Max. 3 W, additionally 0.8 W f. EtherCAT / relays / LCD
      OPERATING TEMPERATURE
      +5…+60°C
      STORAGE TEMPERATURE
      -40…+65°C
      MAX. BAKE OUT TEMPERATURE
      160°C at flange (electronic detached)
      OUTPUT SIGNAL
      0 – 10 VDC, measuring range 1.819 – 8.6 VDC, log., 0.6 V/decade load resistor > 10 kOhm
      SERIAL INTERFACE
      RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
      SWITCH POINT
      2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
      VACUUM CONNECTION
      DN 40 ISO-KF
      PROTECTION CLASS
      IP40
      vsme.pdf
      man_vsm-de-en-171005.pdf

           
			        
      
			    
      
                                                				
			
      
			
      
		
      
	
      
	
    
      
		
      
			
      
				
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