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      昆山熙日機(jī)械設(shè)備有限公司
                                
                
                
      

							
      
                        			
      
		
      
	
      
	
	
      
		
      
            
      
                當(dāng)前位置：昆山熙日機(jī)械設(shè)備有限公司>>真空測(cè)量與檢測(cè)>>thyrcont圖拉特真空計(jì)VSH88DL
            
      
			
      
				
      
					
      thyrcont圖拉特真空計(jì)VSH88DL
      
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      QQ圖片20180107152039.pngthyrcont圖拉特真空計(jì)VSH88DL 
      Thyracont-Smartline-Vakuumtransmitter-VSH88DL-3112-16-DL.jpg
      VSH88DL Vacuum Transducer ● DN40KF ● LCD display
      The digital combination vacuum transducer VSH (Pirani/hot cathode) with integrated display measures absolute pressure from atmospheric pressure to ultrahigh vacuum.
      Microcontroller intelligence automatically manages the optional interplay of both vacuum sensors. Smartline vacuum gauges represent cutting edge technology providing safe, precise and cost effective process control.
      描述
      • Wide range sensor Pirani / Bayard Alpert
      • Pirani with extended range allows operation of hot cathode at
        lower pressure and increases lifetime
      • Excellent accuracy and repeatability
      • Bayard-Alpert with blowing resistant, yttrium coated double filament,
        insensitive against inrush of air
      • Digital RS485 interface and analog output signal 1.219-8.6 V
      • Automatic baud rate detection 9.6 kBd to 115 kBd
      • Two independent, potential-free relay switch points
      • With large, integrated LCD display with background illumination
      • Easily replaceable sensor heads with stored calibration data
      應(yīng)用
      • Coating plants and vapor deposition
      • Sputtering plants
      • Analysis technology
      • Measuring and controlling in the fine and ultrahigh vacuum range
      • Vacuum furnaces
      • Process engineering
      • Space simulation chambers
      技術(shù)參數(shù)
      WEIGHT0.555 kg
      DIMENSIONS4.8 x 6.9 x 1.46 cm
      MEASURING PRINCIPLE
      Pirani / Bayard Alpert, depending on gas type
      MATERIALS IN CONTACT WITH VACUUM
      Stainl. steel 1.4307, Ni, W, Pl, yttrium coated iridium, glass
      MEASUREMENT RANGE
      1000 – 5e-10 mbar (750 – 5e-10 Torr), max. overpressure 4 bar abs.
      ACCURACY
      10 – 1e-8 mbar: < 10 % from reading, 1000 – 10 mbar: < 30 % from reading
      REPEATABILITY
      ±2 % (10 – 1e-2 mbar), 5% (1e-2 – 1e-8 mbar)
      RESPONSE TIME
      < 200 ms (2 s while switching BA emission current)
      EMISSION CURRENT
      Automatic switching 10 µA, 100 µA, 1 mA, 2 mA
      DEGAS
      Ohmic heating of the anode
      POWER SUPPLY
      20 – 30 VDC
      ELECTRICAL CONNECTION
      SubD 15pol., male, lockable
      POWER CONSUMPTION
      Max. 8 W, additional 1 W f. degas and 0.8 W f. EtherCAT/relays/LCD
      OPERATING TEMPERATURE
      +5…+60°C
      STORAGE TEMPERATURE
      -40…+65°C
      MAX. BAKE OUT TEMPERATURE
      180°C at the flange (electronic detached)
      OUTPUT SIGNAL
      0 – 10 VDC, measuring range 1.219 – 8.6 VDC, log., 0.6 V/decade load resistor > 10k W
      SERIAL INTERFACE
      RS485: 9.6 kBd to 115 kBd, address switch 1 – 16
      SWITCH POINT
      2 switch-over relays, 50 VAC / 2 A, 30 VDC / 2 A, max. 60 VA
      VACUUM CONNECTION
      DN 40 ISO-KF
      PROTECTION CLASS
      IP40
      vshe.pdf
      man_vsh-de-en-171005-1.pdf

           
			        
      
			    
      
                                                				
			
      
			
      
		
      
	
      
	
    
      
		
      
			
      
				
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